1 October 1990 "Smart" high-precision microposition feedback control device: theory and experiment
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Ultra High-precision operation is very essential in many optical instruments and modern manufacturing systems. However, mechanical vibrations introduced by various sources can easily disrupt this delicate operation. Thus, active vibration isolation and control becomes very important in many circimstance. This paper presents a "smart" active micro-position feedback control technique using a piezoelectric actuator. A general theory for the piezoelectric actuator subjected to mechanical excitations and feedback voltages is developed. This theory is applied to an active micro-position control by injecting a processed feedback voltage at variable feedback gains into the piezoelectric actuator. Effectiveness of the piezoelectric micro-position attenuation is evaluated analytically and experimentally. Theoretical solutions are compared favorably with the laboratory experimental results.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Horn-Sen Tzou, ""Smart" high-precision microposition feedback control device: theory and experiment", Proc. SPIE 1303, Advances in Optical Structure Systems, (1 October 1990); doi: 10.1117/12.21500; https://doi.org/10.1117/12.21500

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