Research on surface defect detection and identification technique for precision optics

Shuqing Zhang

doi:10.1117/12.3016327

1 February 2024 Research on surface defect detection and identification technique for precision optics

Shuqing Zhang

Proceedings Volume 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023); 130681Y (2024) https://doi.org/10.1117/12.3016327
Event: Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 2023, Hefei, China

Abstract

About the problem of rapid automatic and non-destructive detection for surface defects on precision optics, this paper applies laser scanning and scattering microscopy imaging techniques, combines with existing algorithms of image collecting and image stitching, optimizes the feature recognition and extraction methods for surface defects, and establishes a detection experimental device with vibration isolation function for precision optics surface defects. The final experimental data shows that this detection device system has achieved rapid automatic detection for the surface defects on precision optics, and can efficiently detect and identify submicron level surface defects. Meanwhile this detection device system is with high sensitivity and accuracy during surface defects detecting.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shuqing Zhang "Research on surface defect detection and identification technique for precision optics", Proc. SPIE 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 130681Y (1 February 2024); https://doi.org/10.1117/12.3016327

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