In-situ analysis of multilayer optical coatings: a new method

G. R. Mohan Rao; C. L. Nagendra; G. K. M. Thutupalli

doi:10.1117/12.21649

1 October 1990 In-situ analysis of multilayer optical coatings: a new method

G. R. Mohan Rao, C. L. Nagendra, G. K. M. Thutupalli

Proceedings Volume 1307, Electro-Optical Materials for Switches, Coatings, Sensor Optics, and Detectors; (1990) https://doi.org/10.1117/12.21649
Event: 1990 Technical Symposium on Optics, Electro-Optics, and Sensors, 1990, Orlando, FL, United States

Abstract

A new method for accurate determination of refractive index, 'n' and gecznetrical thickness 'd' of any optical layer of a multilayer syst En the presence of preceeding layers [s developed En which, making use of measured reflectance and/or trannittance over a spectral range , ' n' and 'd' are evaluated through a closed loop nunerical fterati. It [s seen that the method can be applied to any nvltilayer systn, irrespective of the nature of the layer under investigation, thin or ultra-thin, low or high refractive index films. The accuracies of 'n ' and ' ' are in general better than 0 .01 and 10 A0 respectively. The method is successfully applied to determine the layer pararreters of a typical four layer non-quarterwave antireflecti (AR) coating.

Citation Download Citation

G. R. Mohan Rao, C. L. Nagendra, and G. K. M. Thutupalli "In-situ analysis of multilayer optical coatings: a new method", Proc. SPIE 1307, Electro-Optical Materials for Switches, Coatings, Sensor Optics, and Detectors, (1 October 1990); https://doi.org/10.1117/12.21649

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available