1 October 1990 In-situ analysis of multilayer optical coatings: a new method
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Abstract
A new method for accurate determination of refractive index, 'n' and gecznetrical thickness 'd' of any optical layer of a multilayer syst En the presence of preceeding layers [s developed En which, making use of measured reflectance and/or trannittance over a spectral range , ' n' and 'd' are evaluated through a closed loop nunerical fterati. It [s seen that the method can be applied to any nvltilayer systn, irrespective of the nature of the layer under investigation, thin or ultra-thin, low or high refractive index films. The accuracies of 'n ' and ' ' are in general better than 0 .01 and 10 A0 respectively. The method is successfully applied to determine the layer pararreters of a typical four layer non-quarterwave antireflecti (AR) coating.
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G. R. Mohan Rao, G. R. Mohan Rao, C. L. Nagendra, C. L. Nagendra, G. K. M. Thutupalli, G. K. M. Thutupalli, } "In-situ analysis of multilayer optical coatings: a new method", Proc. SPIE 1307, Electro-Optical Materials for Switches, Coatings, Sensor Optics, and Detectors, (1 October 1990); doi: 10.1117/12.21649; https://doi.org/10.1117/12.21649
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