1 October 1990 In-situ analysis of multilayer optical coatings: a new method
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A new method for accurate determination of refractive index, 'n' and gecznetrical thickness 'd' of any optical layer of a multilayer syst En the presence of preceeding layers [s developed En which, making use of measured reflectance and/or trannittance over a spectral range , ' n' and 'd' are evaluated through a closed loop nunerical fterati. It [s seen that the method can be applied to any nvltilayer systn, irrespective of the nature of the layer under investigation, thin or ultra-thin, low or high refractive index films. The accuracies of 'n ' and ' ' are in general better than 0 .01 and 10 A0 respectively. The method is successfully applied to determine the layer pararreters of a typical four layer non-quarterwave antireflecti (AR) coating.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. R. Mohan Rao, G. R. Mohan Rao, C. L. Nagendra, C. L. Nagendra, G. K. M. Thutupalli, G. K. M. Thutupalli, "In-situ analysis of multilayer optical coatings: a new method", Proc. SPIE 1307, Electro-Optical Materials for Switches, Coatings, Sensor Optics, and Detectors, (1 October 1990); doi: 10.1117/12.21649; https://doi.org/10.1117/12.21649


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