Influence of pixel mesa structure on the performance of InGaAs focal plane array detectors

Yanling Lu; Zungui Ke; Guosheng Wang; Mengqi Yao; Ruiyu Yang; Xin Hao; Qian Dai

doi:10.1117/12.3023536

18 March 2024 Influence of pixel mesa structure on the performance of InGaAs focal plane array detectors

Yanling Lu, Zungui Ke, Guosheng Wang, Mengqi Yao, Ruiyu Yang, Xin Hao, Qian Dai

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131043W (2024) https://doi.org/10.1117/12.3023536
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

In this paper, the research and analysis of mesa-type InGaAs FPA detectors with various pixel structures were reported. Three different pixel mesa structures in FPA were designed, including conventional mesa structure, double-mesa and surface pn junction mesa. The numerical simulation of above three pixel mesa structure devices and the conventional pixel planar structure device was carried out, and the optimal pixel structure was determined by comparing the electrical crosstalk and dark current. The results showed that the surface pn junction mesa structure can reduce the surface leakage current of the device by effectively suppressing the electric field of the device mesa etched surface, which was beneficial for reducing the difficulty of passivation protection process. InGaAs FPA detectors with surface pn junction mesa structure can simultaneously have relatively low electrical crosstalk and low dark current characteristics.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yanling Lu, Zungui Ke, Guosheng Wang, Mengqi Yao, Ruiyu Yang, Xin Hao, and Qian Dai "Influence of pixel mesa structure on the performance of InGaAs focal plane array detectors", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131043W (18 March 2024); https://doi.org/10.1117/12.3023536

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Crosstalk

Etching

Staring arrays

Indium gallium arsenide

Sensors

Dark current

Electric fields

Show All Keywords

Keywords/Phrases

Search In:

Publication Years