Fabrication of GaAs quantum rings by in-situ laser irradiation

Gaojun Zhang; Biao Geng; Zequn Zhu; Zhaoxiang Han; Lingsu Cheng; Maoyun Ren; Zhenwu Shi; Changsi Peng

doi:10.1117/12.3023588

18 March 2024 Fabrication of GaAs quantum rings by in-situ laser irradiation

Gaojun Zhang, Biao Geng, Zequn Zhu, Zhaoxiang Han, Lingsu Cheng, Maoyun Ren, Zhenwu Shi, Changsi Peng

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131044J (2024) https://doi.org/10.1117/12.3023588
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

In this work, after depositing a GaAs buffer layer (approx. 200nm) via molecular beam epitaxy, we subjected the GaAs substrate to in-situ irradiation by 15 laser pulses (pulse duration ~10ns) with varying single-pulsed energies of 10mJ, 15mJ, 20mJ, and 30mJ, corresponding to samples A-D. For sample A, quantum rings with a density of 3.75×10⁸/cm² are observed, of which the average height and width are 1.4nm and 22.2nm, respectively. For sample B, the density, average height and width are 5×10⁸/cm², 2.5nm and 69.1nm. With an increase in laser energy, the density and size of sample C and D have increased to 7×10⁸/cm²-3.6nm (height)-78.5nm (width) and 1×10⁹/cm²-5.2nm (height)-86.1nm (width) respectively. Obviously, this novel technology that the GaAs quantum rings can be fabricated in-situ through multi-pulsed laser irradiation whilst the size and density of the quantum rings can be effectively adjusted by varying the laser energy would have significant applications in all types of semiconductor devices based on quantum rings in the future.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Gaojun Zhang, Biao Geng, Zequn Zhu, Zhaoxiang Han, Lingsu Cheng, Maoyun Ren, Zhenwu Shi, and Changsi Peng "Fabrication of GaAs quantum rings by in-situ laser irradiation", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131044J (18 March 2024); https://doi.org/10.1117/12.3023588

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available