Silicon metalens toward a fully silicon integrated SWIR sensing

Matthieu Dupre; Jian Ma; Biay-Cheng Hseih; Sergio Goma

doi:10.1117/12.3027526

1 October 2024 Silicon metalens toward a fully silicon integrated SWIR sensing

Matthieu Dupre, Jian Ma, Biay-Cheng Hseih, Sergio Goma

Proceedings Volume 13131, Current Developments in Lens Design and Optical Engineering XXV; 131310E (2024) https://doi.org/10.1117/12.3027526
Event: Optical Engineering + Applications, 2024, San Diego, California, United States

Abstract

Most Silicon based depth and lidar sensors rely on near-infrared (NIR 750-900nm) sources to produce depth images as Silicon CMOS sensors can achieve a high quantum efficiency for an unbeatable cost at such wavelengths. Advances in Short Wave Infrared (SWIR) sensor technologies, such as Silicon-Germanium sensors, changes this paradigm and opens a new window for groundbreaking sensor designs, as SWIR can push the wavelength above retinal hazard area (⪆1400nm), allowing for much higher eye safety, due to the low penetration of those wavelengths through the eye lens. Here, we propose to use a Silicon Metalens flat optics and build upon our stacked sensor technologies to obtain a fully Silicon integrated stacked sensor at SWIR wavelengths. We will discuss the design of the stacked sensor and focus on the Silicon Metalens for multiple use-cases. We will demonstrate the results of our Silicon metalens prototype at 1550nm. We will show numerical simulations of the optical stack for eye-tracking application or wide-angle Time of Flight (TOF) and discuss the necessary trade-offs.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Matthieu Dupre, Jian Ma, Biay-Cheng Hseih, and Sergio Goma "Silicon metalens toward a fully silicon integrated SWIR sensing", Proc. SPIE 13131, Current Developments in Lens Design and Optical Engineering XXV, 131310E (1 October 2024); https://doi.org/10.1117/12.3027526

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