1 May 1990 Semiconductor and electronics processing
Author Affiliations +
Proceedings Volume 1315, The Laser Marketplace in 1990; (1990) https://doi.org/10.1117/12.637347
Event: The Laser Marketplace in 1990, 1990, Los Angeles, United States
Abstract
First of all let rae clarify a couple terms for you. When we talk about the microelectronics industry that will include everything from crude wiring boards to VLSI. Also, we're going to talk about the spectral. This fits hand in glove, it's no accident Gary planned it this way, you'll see a number of applications where we will need a new generation of laser to move the technology forward. In one case we'll show you where we're currently using in volume production diode pumped lAG lasers. Another couple of terms I'd like to have you just think about. I have dubbed it no man's lithography. Basically in the printed wiring board and the hybrids and in the other packaging arenas, the present photo tools are out of gas. And I'm calling that no man's lithography. You get below 5 microns and the IC technology takes over, you get down to again on a PC board industry thinks of mils you get down much higher than 8 mils lines and spaces, and all of a sudden you're out of gas. That arena between the 5 microns and 8 mils is where we think there's a tremendous opening for lasers.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ed Swensen "Semiconductor and electronics processing", Proc. SPIE 1315, The Laser Marketplace in 1990, (1 May 1990); doi: 10.1117/12.637347; https://doi.org/10.1117/12.637347
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