Imaging polarimeters for optical metrology

J. Larry Pezzaniti; Russell A. Chipman

doi:10.1117/12.22065

1 October 1990 Imaging polarimeters for optical metrology

Proceedings Volume 1317, Polarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray; (1990) https://doi.org/10.1117/12.22065
Event: Polarimetry '90, 1990, Huntsville, AL, United States

Abstract

Two configurations of imaging polarimeters are described that are designed for polaimetric optical metrology. The first is a Stokes imaging polarimeter which measures the polarization response of optical systems to spherical or planar waves of known polarization. The output is images of the degree of polarization, orientation, and eccentricity of polarization ellipses, or Stokes parameters displayed as a function of either the exit pupil or image coordinate of the optical system. The second configuration is a Mueller imaging polarimeter which measures the Mueller matrix of an optical system on a ray-by-ray basis. Calibration issues involved in building the instruments are addressed along with a brief discussion on polarization aberration mechanisms.

Citation Download Citation

J. Larry Pezzaniti and Russell A. Chipman "Imaging polarimeters for optical metrology", Proc. SPIE 1317, Polarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray, (1 October 1990); https://doi.org/10.1117/12.22065

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