Paper
1 December 1990 Laser techniques for studying chemical vapor deposition
Pauline Ho, William G. Breiland, Michael E. Coltrin
Author Affiliations +
Proceedings Volume 1318, Optical Spectroscopic Instrumentation and Techniques for the 1990s: Applications in Astronomy, Chemistry, and Physics; (1990) https://doi.org/10.1117/12.22092
Event: Optical Spectroscopic Instrumentation and Techniques for the 1990s: Applications in Astronomy, Chemistry, and Physics, 1990, Las Cruces, NM, United States
Abstract
No abstract available.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pauline Ho, William G. Breiland, and Michael E. Coltrin "Laser techniques for studying chemical vapor deposition", Proc. SPIE 1318, Optical Spectroscopic Instrumentation and Techniques for the 1990s: Applications in Astronomy, Chemistry, and Physics, (1 December 1990); https://doi.org/10.1117/12.22092
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KEYWORDS
Chemical vapor deposition

Laser spectroscopy

Laser induced fluorescence

Spectroscopy

Fluorescence spectroscopy

Materials processing

Raman spectroscopy

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