1 July 1990 Corner diffraction as an elementary act in binary optics
Author Affiliations +
Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.22157
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
A two-dimensional lithographic structure is a typical object in binary optics. The diffraction on such objects can be decomposed into elementary processes at corners.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Adolf W. Lohmann, Adolf W. Lohmann, } "Corner diffraction as an elementary act in binary optics", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.22157; https://doi.org/10.1117/12.22157

Back to Top