1 July 1990 Dual-wavelength heterodyne interferometry for rough-surface measurements
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Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34857
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
Abstract
For interferometric topography measurements of optically rough surfaces dual wavelength heterodyne interferometry (DWHI) is a powerful tool. A DWHI system based on a two-wavelength HeNe laser and a matched grating technique is described. This set-Sup improves system stability and allows a simple heterodyne frequency generation. 1.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edgar W. Fischer, Zoran Sodnik, Thomas Ittner, Hans J. Tiziani, "Dual-wavelength heterodyne interferometry for rough-surface measurements", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34857; https://doi.org/10.1117/12.34857
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