1 July 1990 Dual-wavelength heterodyne interferometry for rough-surface measurements
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Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34857
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
Abstract
For interferometric topography measurements of optically rough surfaces dual wavelength heterodyne interferometry (DWHI) is a powerful tool. A DWHI system based on a two-wavelength HeNe laser and a matched grating technique is described. This set-Sup improves system stability and allows a simple heterodyne frequency generation. 1.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edgar W. Fischer, Edgar W. Fischer, Zoran Sodnik, Zoran Sodnik, Thomas Ittner, Thomas Ittner, Hans J. Tiziani, Hans J. Tiziani, } "Dual-wavelength heterodyne interferometry for rough-surface measurements", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34857; https://doi.org/10.1117/12.34857
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