High-speed and high-resolution heterodyne interferometer

Shuko Yokoyama; I. Nishihara; A. Okamoto; Tsutomu Araki; Norihito Suzuki

doi:10.1117/12.22135

1 July 1990 High-speed and high-resolution heterodyne interferometer

Shuko Yokoyama, I. Nishihara, A. Okamoto, Tsutomu Araki, Norihito Suzuki

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.22135
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

In conventional heterodyne interferometer it Is necessary to provide a high-beat frequency laser when measurement for a high-speed target Is required1 . But use of the high-beat frequency laser makes the " nanometerdivisions" difficult. We have developed a novel interferometer system that has a sufficient response to high-speed movement of the target without Increase of the laser beat frequency. In this work a two frequency laser light passes through the same optical path of the interferometer so that two conjugate beat signals are obtained. By processing the multiple beat signals with a newly developed signal processor the above methodological contradiction is solved. l. OPTICS FOR LINEAR DISTANCE MEASUREMENT Optical system of the interferometer Is shown In Flg. l in which two frequency lights Fl and F2 (freq. f and f2) of orthogonally linear-polarized components of a two mode laser are used. A reference beat signal R (freq. r ) is generated from Fl and F2. Fl and F2 are passed through exactly the same path of the interferometer. A half power of Fl and F2 Is reflected and the rest Is transmitted In the beam splitter ( BS ). Polarization direction of the reflected beam is rotated for ir/2 after passing the X/4 plate twice. The transmitted beam Is reflected by a moving mirror (MM) mounted on the moving target so that frequency of the reflected beam Is shifted by Doppler

Citation Download Citation

Shuko Yokoyama, I. Nishihara, A. Okamoto, Tsutomu Araki, and Norihito Suzuki "High-speed and high-resolution heterodyne interferometer", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.22135

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