Manufacture and testing of microlens arrays

Michael C. Hutley

doi:10.1117/12.34817

1 July 1990 Manufacture and testing of microlens arrays

Michael C. Hutley

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34817
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

We have manufactued arrays of lenses in photoresist using a technique described by Popovic et al,(1) in which small islands of resist are melted and take up a hemispherical form under the effect of surface tension. The pirpose of this paper is to describe the range of lenses that can be made using this technique and to consider the ways in which their optical properties may be measured and specified.

Citation Download Citation

Michael C. Hutley "Manufacture and testing of microlens arrays", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34817

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