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1 July 1990 Optical microtopographer for rough surfaces
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Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34864
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
Abstract
We describe a noncontact optical microtopographer designed to map the relief of rough surfaces with resolutions in the submicron order. The principle of operation is based on the horizontal shift of a bright light spot on an horizontal surface illuminated by an oblique light beam when that surface suffers a vertical displacement. In this system the optical mecanical and electrooptical hardware contraints are more important than the software ones in oposition to what happens in other systems namely those using fringe projection.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Manuel Filipe M. Costa and Jose B. Almeida "Optical microtopographer for rough surfaces", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34864
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