1 July 1990 Photothermal self-excitation of the micromachined resonators
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Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.22278
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
Recently interest has grown to the physical quantities fibre-optic sensors in which a micromachined resonator acts as a sensitive element. This resonator can change the resonant frequency when acted upon by an outside force. Energy supply necessary for the resonator excitation and transfer of information about the outer action are accomplished by optical fibres, that can be present in the zone of a higher aggressiveness, strong electromagnetic interferences atc. The frequency output of such sensors is easily processed by digital systems and is insensitive to signal level.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alexander V. Churenkov, Alexander V. Churenkov, Stanislav M. Kozel, Stanislav M. Kozel, Vladimir N. Listvin, Vladimir N. Listvin, } "Photothermal self-excitation of the micromachined resonators", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.22278; https://doi.org/10.1117/12.22278

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