1 July 1990 Side-looking confocal microscope
Author Affiliations +
Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34806
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany
We developed the Side Looking Confocal Microscope(SLCM) of which illmination axis and sensing axis are tilted from a perpendicular plane of an object. The standard confocal microscope has also an illmination source and a sensor which are situated on the same optical axis from an object. Its enterance angle is zero degrees. So in that case we can''t see 3-dimensional images -which are only bright field image- by means of standard confocal microscope method. SLCM which we developed is able to see 3-dimensional easily like a SEM image because of its angular illumination method.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takahiro Ode, Takahiro Ode, Satoshi Komiya, Satoshi Komiya, Y. Yamauchi, Y. Yamauchi, Daikichi Awamura, Daikichi Awamura, } "Side-looking confocal microscope", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); doi: 10.1117/12.34806; https://doi.org/10.1117/12.34806

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