Automated precision reflectometer for first-surface mirrors I: optical head

Erik W. Anthon; Luis F. Villanueva; Craig Van Horn; Richard Ian Seddon

doi:10.1117/12.22403

1 December 1990 Automated precision reflectometer for first-surface mirrors I: optical head

Erik W. Anthon, Luis F. Villanueva, Craig Van Horn, Richard Ian Seddon

Proceedings Volume 1323, Optical Thin Films III: New Developments; (1990) https://doi.org/10.1117/12.22403
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Multilayer-overcoated, high-reflector mirrors in sizes up to 30" x 50" areproduced on a continuous coating line. A fully-automatic, highly-accurate scanning reflectometer has been built as part of the process-control system for the continuous coating line. The reflectometer covers a spectral range of 380 to 800 nm and a range of incidence angles of 15° to 6O. The s- and the p-polariation components of reflectance are scanned separately. The reflectance measurements are absolute and are not referenced to a calibrated standard reflector. The absolute measurement accuracy is This paper describes the optical system used in the reflectometer.

Citation Download Citation

Erik W. Anthon, Luis F. Villanueva, Craig Van Horn, and Richard Ian Seddon "Automated precision reflectometer for first-surface mirrors I: optical head", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22403

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