1 December 1990 Automated precision reflectometer for first-surface mirrors I: optical head
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Abstract
Multilayer-overcoated, high-reflector mirrors in sizes up to 30" x 50" areproduced on a continuous coating line. A fully-automatic, highly-accurate scanning reflectometer has been built as part of the process-control system for the continuous coating line. The reflectometer covers a spectral range of 380 to 800 nm and a range of incidence angles of 15° to 6O. The s- and the p-polariation components of reflectance are scanned separately. The reflectance measurements are absolute and are not referenced to a calibrated standard reflector. The absolute measurement accuracy is This paper describes the optical system used in the reflectometer.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erik W. Anthon, Erik W. Anthon, Luis F. Villanueva, Luis F. Villanueva, Craig Van Horn, Craig Van Horn, Richard Ian Seddon, Richard Ian Seddon, "Automated precision reflectometer for first-surface mirrors I: optical head", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22403; https://doi.org/10.1117/12.22403
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