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1 December 1990 Automated precision reflectometer for first-surface mirrors II: system
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Abstract
A computer-controlled spectrometer has been built for measuring high-reflectance mirrors in the visible region (380 800 nm). The instrument is designed to scan high-reflectance mirrors (greater than 50%) on a surface up to 32 x 50 in. Plots of complete reflectance scans are available in minutes and are used for process control. The reflectometer can be set to any desired incidence angle in the range of 15 to 60° and four different polarization modes can be selected: P, S, P&S, and No Polarization. The instrument incorporates several techniques in order to perform as an absolute system with an overall accuracy of better than 1% . The optical system features double-bounce reflection, a special integrating-sphere light source, a double-stage monochromator, and a high-uniformity, 9-stage, side-on photomultiplier tube. This paper will focus on the electronics, controls and computer system used in the reflectometer.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Luis F. Villanueva, Tom Engel, Richard Ian Seddon, Craig Van Horn, and Erik W. Anthon "Automated precision reflectometer for first-surface mirrors II: system", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22404
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