1 December 1990 Effect of ion-assisted deposition on optical properties of thin films
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Abstract
Effects of ion assisted deposition on the propertes of Ti02, Zr02 and 5102 optical coatings were investigated. Substrates were bombarded with different ions--- oxygen ions , argon ions , and the mixture ions of oxygen-argon during deposition. The refractive indices, optical absorptions and laser-induced damage thresholds (LIDT) measurments of these films are reported.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuefei Tang and Zhengxiu Fan "Effect of ion-assisted deposition on optical properties of thin films", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22374; https://doi.org/10.1117/12.22374
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