A hollow cathode electron/ion source with permanent-magnet-field was introduced to assist depositing oxidemetal optical coatings. The refractive index ,absoption and scatter of as -deposited layers arediscussed. It wasfound that the optical loss (absoption and scatter) decreased under proper depositing conditions. The optirnumevaporating parameters were obtained through orthogonal experiments.
Jiu Lin Zhou,
Qian Ru Liu,
"Electron-rain-assisted deposition of optical thin films", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22373; https://doi.org/10.1117/12.22373