1 December 1990 Production of magneto-optical data storage media by static DC sputter processes
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Static sputter processes for the mass production of 5.25" magneto-optical data storage media have been developed. Such single disk processes require a discontinuous operation of circular magnetron cathodes in nonreactive and reactive gas atmospheres. Magnetron field configurations based on specially shaped rotating magnet patterns allow to meet high uniformity criteria for optical and magnetic properties of the individual layers using 210 mm targets and an integrated inner/outer diameter disk masking. The processes have been integrated into avery compact 'circular path coater' which realizes a throughput of 180 disks/hour. Experimental results of the process development for SiN and TbEeCo thin films are presented.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guenter Braeuer, Guenter Braeuer, Wilfried Dicken, Wilfried Dicken, Sabine Mueller, Sabine Mueller, } "Production of magneto-optical data storage media by static DC sputter processes", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); doi: 10.1117/12.22382; https://doi.org/10.1117/12.22382


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