1 December 1990 Ballistic simulation of optical coatings deposited over topography
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Abstract
The use of SIMBAD, a two dimensional ballistic deposition simulation of the growth of thin films, is suggested for investigation of refractive index inhomogeneities in integrated optics devices. Refractive index variation as a function of packing fraction is obtained experimentally for evaporated MgF and sputtered SiO2 by depositing films at angles. These relationships are used to translate SIMBAD density predictions to refractive index predictions for films deposited on integrated optics topographies.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. N. Tait, R. N. Tait, S. K. Dew, S. K. Dew, Tom J. Smy, Tom J. Smy, Michael J. Brett, Michael J. Brett, "Ballistic simulation of optical coatings deposited over topography", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22422; https://doi.org/10.1117/12.22422
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