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1 December 1990Ballistic simulation of optical coatings deposited over topography
The use of SIMBAD, a two dimensional ballistic deposition simulation of the growth of thin films, is
suggested for investigation of refractive index inhomogeneities in integrated optics devices. Refractive
index variation as a function of packing fraction is obtained experimentally for evaporated MgF and
sputtered SiO2 by depositing films at angles. These relationships are used to translate SIMBAD density
predictions to refractive index predictions for films deposited on integrated optics topographies.
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R. N. Tait, S. K. Dew, Tom J. Smy, Michael J. Brett, "Ballistic simulation of optical coatings deposited over topography," Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); https://doi.org/10.1117/12.22422