Effects of surface diffusion on thin-film morphology: a computer study

Robert B. Sargent

doi:10.1117/12.22412

1 December 1990 Effects of surface diffusion on thin-film morphology: a computer study

Robert B. Sargent

Proceedings Volume 1324, Modeling of Optical Thin Films II; (1990) https://doi.org/10.1117/12.22412
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A two-dimensional hard-disk model of thin-film deposition is described; the model is of the type originally introduced by Henderson et al.1 We have implemented a simple (and necessarily approximate) way to incorporate the effects of surface diffusion in our model, and a means to connect the input parameters of the computer algorithm to the evaporation parameters of substrate temperature and evaporation rate. The effects of surface diffusion and vapor-incidence angle on film structure are explored; the effects of surface diffusion predicted by the model correlate with the transition in film structure (Zone 1 to Zone 2) first described by Movchan and Demchishin.2

Citation Download Citation

Robert B. Sargent "Effects of surface diffusion on thin-film morphology: a computer study", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); https://doi.org/10.1117/12.22412

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available