1 December 1990 Inhomogeneity in layers of dielectric high index materials: a simplified study for an antireflection coating
Author Affiliations +
Abstract
A simple procedure to evidence inhomogeneity in the refractive index of a single dielectric thin film included in a AR coating is developed. It requires only the use of standard measurement equipment: a spectrophotometer and a three wavelength e 1 lipsometer. The results show a good agreement between different characterization methods: reflectance, ellipsometry and single layer spectrophotometric analysis.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Salvador Bosch, Salvador Bosch, } "Inhomogeneity in layers of dielectric high index materials: a simplified study for an antireflection coating", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); doi: 10.1117/12.22427; https://doi.org/10.1117/12.22427
PROCEEDINGS
9 PAGES


SHARE
Back to Top