1 December 1990 Development and performance of a diamond-film polishing apparatus with hot metals
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Abstract
The diamond film polishing apparatus with hot metals has been presented . Diamond films deposited by both microwave plasma CVD and arc discharge plasma jet CVD are used as workpieces . As a diamond film sways on a polishing plate made of an iron or a nickel heated to 75O''95O C it is finished to flat and glass-like surfaces without any exfoliation. Not only swaying speed but also polishing pressure in this apparatus are extremely low in comparison to a conventional mechanical polishing method. When a cast iron and a molybdenum are used as a polishing plate polishing is not advanced . The polishing rate is highest in a vacuum atmosphere . Among gas atmospheres the rate is highes t in a hydrogen atmosphere . These result show that a diamond film is polished by the diffusion of carbon into a polishing plate. When a diamond film surface is too rough to polish by this apparatus the surface planing with YAG laser is applied then polishing is conducted on the planed surface. 1 .
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masanori Yoshikawa, Masanori Yoshikawa, } "Development and performance of a diamond-film polishing apparatus with hot metals", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); doi: 10.1117/12.22460; https://doi.org/10.1117/12.22460
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