KrF excimer laser deposition of diamond-like carbon films with germanium interlayers

Richard T. Demers; Dennis G. Harris

doi:10.1117/12.22446

1 December 1990 KrF excimer laser deposition of diamond-like carbon films with germanium interlayers

Richard T. Demers, Dennis G. Harris

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22446
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

We have investigated the process of UV laser evaporation of diamond-like carbon films on metallic and semiconducting alloys. High purity targets in vacuum were irradiated with a pulsed KrF excimer laser beam (248 nm). Adhesion of diamond-like carbon films to several materials was improved by applying in situ germanium interlayers. Various process parameters were varied to determine the optimum conditions for deposition. The diamond-like films and germanium interlayers were structurally characterized by inelastic light scattering and scanning electron microscopy. Mechanical properties such as indenter hardness and friction coefficient were also measured. Preliminary results indicate that films deposited at low substrate temperature and high laser fluence have superior mechanical properties.

Citation Download Citation

Richard T. Demers and Dennis G. Harris "KrF excimer laser deposition of diamond-like carbon films with germanium interlayers", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22446

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