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1 December 1990 Morphological phenomena of CVD diamond (Part I)
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Abstract
A parametric influence on the morphology of CVD diamond has been investigated. While the gas pressure has a minor effect on the morphological development of diamond in the optimum temperature range, the influences by the substrate temperature, the methane concentration in hydrogen, and the gas flow rate are found to be substantial. With an increase of substrate temperature or gas flow rate over the range in this study, the surface of diamond films changes from the f 100) face dominating to the { 1 1 1 } face prevailing. With an increase of methane concentrations from 0.5% to 2%, the morphology of diamond films changes from the triangular 1 1 1 ) faces to the square f 100) faces. Further increasing methane concentrations to 5% results in a film with sub-.tm crystallite aggregates. These experimental variables change the diamond morphology possibly by influencing the free energies of crystallographic faces and the atom mobility on the surface.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Zhu, Andrzej R. Badzian, and Russell F. Messier "Morphological phenomena of CVD diamond (Part I)", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22458
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