Paper
1 October 1990 Diamond films for IR optical applications
Mark B. Moran, Lee F. Johnson, Karl A. Klemm
Author Affiliations +
Abstract
Since materials with the best optical properties have low-fracture toughness, the need for protective coatings for IR windows and domes has been recognized for a long time. The emergence of technology for deposition of polycrystalline diamond (PCD) coatings by microwave-assisted chemical vapor deposition presents an opportunity to provide protective coatings for IR materials. Results of deposition of PCD films on various substrates will be presented. Diamond film morphology can be tailored from very smooth (35-Å RMS roughness) to textured with very large crystallites (20-μm diameter) with deposition rates from 0.5 to 2 μm/hr. Substrate surface preparation using a nonabrasive refractory interlayer technique will be described. Film morphology, characterization, and polishing that uses a chemical polishing technique will also be discussed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark B. Moran, Lee F. Johnson, and Karl A. Klemm "Diamond films for IR optical applications", Proc. SPIE 1326, Window and Dome Technologies and Materials II, (1 October 1990); https://doi.org/10.1117/12.22492
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Diamond

Crystals

Polishing

Silicon carbide

Optical coatings

Surface finishing

Chemical vapor deposition

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