1 November 1990 Optical and mechanical characterization of spin-on deposited silicon and titanium dioxide films
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Abstract
Spin-on deposited SiO-TiO2 thin films (pure and doped with dyes) are produced. Their optical and mechanical properties are determined and their use for a number of applications is investigated. The spin-on deposited SiOi film has been succesfully doped with coumarin as a colour center and characterized as a waveguide overlay.
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Pengnian Shen, Pengnian Shen, Ming-Jun Li, Ming-Jun Li, S. Iraj Najafi, S. Iraj Najafi, John F. Currie, John F. Currie, Richard Leonelli, Richard Leonelli, } "Optical and mechanical characterization of spin-on deposited silicon and titanium dioxide films", Proc. SPIE 1328, Sol-Gel Optics, (1 November 1990); doi: 10.1117/12.22572; https://doi.org/10.1117/12.22572
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