Paper
1 December 1990 CO2 jet flush cleaning performance monitored by surface scatter measurements
Mark E. Frink, Ron Laybon
Author Affiliations +
Abstract
Fresnel lenses, when used as light condensors, generate many spurious ghost images due to multiple refraction and reflection of light between the facets and risers. In some applications, such as overhead projection, these images can be visible to the user. Using the technique of nonsequential ray tracing, the origin, direction, and intensity of these ghost images are analysed for two types of Fresnel lens doublet systems. Techniques for the reduction or elimination of these ghost images are also discussed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark E. Frink and Ron Laybon "CO2 jet flush cleaning performance monitored by surface scatter measurements", Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); https://doi.org/10.1117/12.22668
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KEYWORDS
Scatter measurement

Natural surfaces

Particles

Tungsten

Aluminum

Semiconducting wafers

Silicon

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