Characterization of optical blacks by infrared ellipsometry and reflectometry

Soe-Mie F. Nee; Harold E. Bennett

doi:10.1117/12.22660

1 December 1990 Characterization of optical blacks by infrared ellipsometry and reflectometry

Soe-Mie F. Nee, Harold E. Bennett

Proceedings Volume 1331, Stray Radiation in Optical Systems; (1990) https://doi.org/10.1117/12.22660
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The reflectance and the ellipsometric parameters for two black samples were measured at 5-j.tm wavelength and at multiple incident angles using an ellipsometer. Different models were used to reduce the ellipsometric data and to calculate the reference specular reflectance. With the correct model, the measured reflectance and the near-angle scattering with respect to the reference specular reflectance can agree with Beckmann's scattering theory. The roughness reduced from reflectometry is independent of ellipsometric models and is used to select the correct set of solutions. A three-phase model in which the complex dielectric constant is computed from Bruggeman's effective medium theory can provide consistent solutions between roughness from reflectometry and effective thickness from ellipsometry. A combination of ellipsometry, reflectometry, and scatterometry can predict accurately the complex index of refraction, roughness, and other optical properties of black samples.

Citation Download Citation

Soe-Mie F. Nee and Harold E. Bennett "Characterization of optical blacks by infrared ellipsometry and reflectometry", Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); https://doi.org/10.1117/12.22660

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