1 December 1990 Correlation of BRDF and profilometry for sub-Angstrom surfaces
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Recent improvements in optical polishing techniques have made possible optical surfaces exhibiting random microroughness levels of less than one Angstrom rms. One such mirror, recently produced by the Photronics Corporation and tested at TRW, exhibited a measured microroughness of 0.22 A rms but had scatter behavior which was not commensurate with this value. The problem was discovered to be point defects in the surface which were not detected during profilometry, and which would not have been problematic in mirrors having microroughnesses of a few A rms. It is concluded that visual scatter inspection, at a minimum, should be used as an in-process polishing diagnostic, in addition to profilometry.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lane A. Darnton, Lane A. Darnton, Steven G. Silott, Steven G. Silott, Duane A. Willis, Duane A. Willis, } "Correlation of BRDF and profilometry for sub-Angstrom surfaces", Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); doi: 10.1117/12.22667; https://doi.org/10.1117/12.22667


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