Abstract
The testing of spherical surfaces using the three-measurement technique outlined by Jensen requires very precise alignment of the sphere relative to the interferometer. An easier technique for the absolute measurement of spherical surfaces has been developed which does not require the precise alignment of the Jensen technique and uses only two measurements. As long as the test surface does not contain any aberrations with odd symmetry, these aberrations can be subtracted from the measurement and an absolute measurement of the test surface can be obtained. This paper describes and compares these two techniques and shows results of testing a A112 P-V (jeak-to-valley) sphere (N.A.=0.4) using both techniques with a phase-measuring Fizeau interferometer. These measurement techniques are repeatable to waves PV.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Katherine Creath, Katherine Creath, James C. Wyant, James C. Wyant, } "Absolute measurement of spherical surfaces", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51045; https://doi.org/10.1117/12.51045
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