1 January 1991 Holographic measurement of the angular error of a table moving along a slideway
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Abstract
An optical method for the precise measurement of the angular errors of a table moving along a slideway is described. The system is arranged so that angular errors of the table give rise to sideways shifts of a random wavefront generated by a ground glass screen. The shifted wavefront is made to interfere with a reconstruction of the original unshifted wavefront produced by a hologram, and the angular errors determined from the interference fringes which appear. This technique has several advantages over usual autocollimator methods.
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Kiyofumi Matsuda, Koji Tenjimbayashi, "Holographic measurement of the angular error of a table moving along a slideway", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51073; https://doi.org/10.1117/12.51073
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