Interferometer for testing aspheric surfaces with electron-beam computer-generated holograms

Takashi Gemma; Masayuki Hideshima; Makoto Taya; Nobuko Watanabe

doi:10.1117/12.51053

Abstract

This paper describes an interferometer system for testing aspheric surfaces with computer-generated holograms (CGHs). A CGH written by electron-beams achieves the precise testing of a wide range of aspheric surfaces. A new algorithm removes the error caused by misalignment of a CGH and a testing surface. This system can test aspheric surfaces with accuracy 2/10 (P-V value) and repeatability /5OO (RMS value).

Citation Download Citation

Takashi Gemma, Takashi Gemma, Masayuki Hideshima, Masayuki Hideshima, Makoto Taya, Makoto Taya, Nobuko Watanabe, Nobuko Watanabe, } "Interferometer for testing aspheric surfaces with electron-beam computer-generated holograms", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51053; https://doi.org/10.1117/12.51053

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