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1 January 1991 Laser moire topography for 3-D contour measurement
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Abstract
The use of the phase shifting interferometric technique is discussed to make quantitative surface profiling using the Nomarski differential interference microscope. Lateral shift of the Nomarski prism introduces mutual phase shift between interfering two wavefronts with small amount of shear. Since the analyzed phase distribution corresponds to the differential of the surface profile under test, integration of the phase distribution gives the correct surface topography. The procedure for an analysis method and experimental results are presented.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tetsuya Matsumoto, Yoichi Kitagawa, Masaaki Adachi, and Akihiro Hayashi "Laser moire topography for 3-D contour measurement", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51101
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