1 January 1991 Nomarski viewing system for an optical surface profiler
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Abstract
A CCD camera system has been added to a surface profiler to display Nomarski enhanced images of a surface under test. The viewing system provides an expanded view of the test surface for identifying the location and extent of surface features. Practical engineering considerations of the optical and illumination systems will be discussed. Also, examples of surface images and their respective profile scans will be shown.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph Bietry, Joseph Bietry, R. Anthony Auriemma, R. Anthony Auriemma, Thomas C. Bristow, Thomas C. Bristow, Edward Merritt, Edward Merritt, } "Nomarski viewing system for an optical surface profiler", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51102; https://doi.org/10.1117/12.51102
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