1 January 1991 Numerical investigation of effect of dynamic range and nonlinearity of detector on phase-stepping holographic interferometry
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Abstract
The effect of imperfectness of detector's characteristics on measurement accuracy in phase-stepping interferometry is investigated by numerical stimulation method. Based on the results, the determination method of system parameters to achieve desired accuracy requrement is discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qiang Fang, Qiang Fang, Xiangyang Luo, Xiangyang Luo, Yushan Tan, Yushan Tan, } "Numerical investigation of effect of dynamic range and nonlinearity of detector on phase-stepping holographic interferometry", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51071; https://doi.org/10.1117/12.51071
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