1 January 1991 Real-time wavefront measurement with lambda/10 fringe spacing for the optical shop
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Abstract
We will report on a new interferometer developed at Carl Zeiss, which has real-time measuring capability with instant visualization of results, is nearly insensitive to vibrations, has a variable fringe spacing from one lambda to lambda/1O (lambda represents the wavelength of the light used in the interferometric test), and can give lambda/100 accuracy through a simple calibration procedure. It can be handled with the same ease and in just the same way as conventional interferometers.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Klaus R. Freischlad, Michael F. Kuechel, Karl-Heinz Schuster, Ulrich Wegmann, Winfried M. Kaiser, "Real-time wavefront measurement with lambda/10 fringe spacing for the optical shop", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51047; https://doi.org/10.1117/12.51047
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