Review of phase-measuring interferometry

H. Philip Stahl

doi:10.1117/12.51121

1 January 1991 Review of phase-measuring interferometry

H. Philip Stahl

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51121
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The theory and practice of phase-measuring interferometry (PMI) are reviewed. The phase measurement algorithms are discussed and phase modulation and wavefront reconstruction are examined as part of the implementation of PMI. The performance limitations of PMI are addressed.

Citation Download Citation

H. Philip Stahl "Review of phase-measuring interferometry", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51121

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