Software concept for the new Zeiss interferometer

Bernd Doerband; Wolfgang Wiedmann; Ulrich Wegmann; C. Wolfgang Kuebler; Klaus R. Freischlad

doi:10.1117/12.51117

Abstract

The new Zeiss interferometer works with a complex software package which can be run in two different modes : a "workshop mode" for simple pushbutton operation of standard measurement sequences, and a "master mode" well suited for the use in the laboratory with changing requirements for measurement and evaluation methods. Macros of arbitrary functional sequences can be created in the master mode and associated with function keys for the workshop mode. A description of the implemented features concerning data acquisition and display, control of the instrument as well as data evaluation and manipulation is given.

Citation Download Citation

Bernd Doerband, Wolfgang Wiedmann, Ulrich Wegmann, C. Wolfgang Kuebler, Klaus R. Freischlad, "Software concept for the new Zeiss interferometer", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51117; https://doi.org/10.1117/12.51117

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