Software concept for the new Zeiss interferometer

Bernd Doerband; Wolfgang Wiedmann; Ulrich Wegmann; C. Wolfgang Kuebler; Klaus R. Freischlad

doi:10.1117/12.51117

1 January 1991 Software concept for the new Zeiss interferometer

Bernd Doerband, Wolfgang Wiedmann, Ulrich Wegmann, C. Wolfgang Kuebler, Klaus R. Freischlad

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51117
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The new Zeiss interferometer works with a complex software package which can be run in two different modes : a "workshop mode" for simple pushbutton operation of standard measurement sequences, and a "master mode" well suited for the use in the laboratory with changing requirements for measurement and evaluation methods. Macros of arbitrary functional sequences can be created in the master mode and associated with function keys for the workshop mode. A description of the implemented features concerning data acquisition and display, control of the instrument as well as data evaluation and manipulation is given.

Citation Download Citation

Bernd Doerband, Wolfgang Wiedmann, Ulrich Wegmann, C. Wolfgang Kuebler, and Klaus R. Freischlad "Software concept for the new Zeiss interferometer", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51117

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available