Two-dimensional micropattern measurement using precision laser beam scanning

Hiroo Fujita

doi:10.1117/12.51094

1 January 1991 Two-dimensional micropattern measurement using precision laser beam scanning

Hiroo Fujita

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51094
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A novel image scanning technique, the pulse counting method, has been developed for geometric parameter measurement of optical fibers. The theory and implement of this technique are described. Experimental results show that the resolution and the repeatability of the system with this technique are O.OO5pm and O.lpm (3a) , respectively. Indexing Words: Image Scanning; Geometric Measurement; Optical Fibers;

Citation Download Citation

Hiroo Fujita "Two-dimensional micropattern measurement using precision laser beam scanning", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51094

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