1 January 1991 Two-dimensional micropattern measurement using precision laser beam scanning
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Abstract
A novel image scanning technique, the pulse counting method, has been developed for geometric parameter measurement of optical fibers. The theory and implement of this technique are described. Experimental results show that the resolution and the repeatability of the system with this technique are O.OO5pm and O.lpm (3a) , respectively. Indexing Words: Image Scanning; Geometric Measurement; Optical Fibers;
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroo Fujita, Hiroo Fujita, } "Two-dimensional micropattern measurement using precision laser beam scanning", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); doi: 10.1117/12.51094; https://doi.org/10.1117/12.51094
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