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1 November 1990 Laser diode technologies for in-process metrology
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Abstract
Measurement of an optical surface by a figure measuring device allows one to make an estimate of the shape of the surface. The absolute accuracy in locating the "true" surface depends on the sources of error in the measurement process - both random errors and systematic errors. Analysis procedures have been developed to extract surface figure information from optical profiler measurements on large mirrors. Rigid-body orientation effects are important in analyzing the shape of the off-axis ellipsoidal reflectors used as grazing incidence mirrors in soft-x-ray synchrotron instrumentation. Knowledge of the noise level and optical aberration function of the Long Trace Profiler allow us to place error bars smaller than lambda/100 on measurements of surfaces that are more than 500mm long.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter J. de Groot "Laser diode technologies for in-process metrology", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22804
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