1 November 1990 Novel noncontact profiler design for measuring synchrotron radiation mirrors
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Abstract
A novel optical profiler is described in this paper for measurement of surface profiles of synchrotron radiation (SR) mirrors. The measurement is based on a combination of an optical heterodyne technique and a precise phase measurement procedure without a reference surface. A Zeeman two-frequency He-Ne laser is employed as the light source. The common-path optical system, which uses a birefringent lens as the beam splitter, minimizes the effects of air turbulence, sample vibration and temperature variation. A special autofocus system allows the profiler to measure the roughness and shape of a sample surface. The optical system is mounted on a large linear air-bearing slide, and is capable of scanning over distances covering the spatial period range from several microns to nearly one meter with a high measurement accuracy.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yao Lin, Peter Z. Takacs, Karen Furenlid, Robert A. DeBiasse, Runwen Wang, "Novel noncontact profiler design for measuring synchrotron radiation mirrors", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); doi: 10.1117/12.22800; https://doi.org/10.1117/12.22800
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