1 November 1990 Stylus profilometry of large optics
Author Affiliations +
There is a critical need for new metrology tools for bridging the gap between mechani cal profilometry and high-resolution Interterometry in the manufacture of advanced optical components. A new class of instruments is becoming available because of the rapid advances In laser diode technology. Properties of modern index-guIded laser diodes include wavelength tunability, multiple wavelength operation, excellent spatial coherence and low unit cost. These properties can be used for absolute distance measurement on polished and unpolished optical surfaces during fabrication.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William J. Wills-Moren, Peter B. Leadbeater, "Stylus profilometry of large optics", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); doi: 10.1117/12.22803; https://doi.org/10.1117/12.22803


Fabrication and metrology study for M3M of TMT
Proceedings of SPIE (September 02 2014)
Compact Air Bearing Beam Scanner: Production And Test
Proceedings of SPIE (October 26 1983)
A stitching method to test the segments of a large...
Proceedings of SPIE (September 01 2009)
A New Test For Cylindrical Optics
Proceedings of SPIE (November 03 1986)

Back to Top