1 November 1990 Stylus profilometry of large optics
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There is a critical need for new metrology tools for bridging the gap between mechani cal profilometry and high-resolution Interterometry in the manufacture of advanced optical components. A new class of instruments is becoming available because of the rapid advances In laser diode technology. Properties of modern index-guIded laser diodes include wavelength tunability, multiple wavelength operation, excellent spatial coherence and low unit cost. These properties can be used for absolute distance measurement on polished and unpolished optical surfaces during fabrication.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William J. Wills-Moren, William J. Wills-Moren, Peter B. Leadbeater, Peter B. Leadbeater, } "Stylus profilometry of large optics", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); doi: 10.1117/12.22803; https://doi.org/10.1117/12.22803


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