PROCEEDINGS VOLUME 1343
34TH ANNUAL INTERNATIONAL TECHNICAL SYMPOSIUM ON OPTICAL AND OPTOELECTRONIC APPLIED SCIENCE AND ENGINEERING | 8-13 JULY 1990
X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography
Editor(s):
34TH ANNUAL INTERNATIONAL TECHNICAL SYMPOSIUM ON OPTICAL AND OPTOELECTRONIC APPLIED SCIENCE AND ENGINEERING
8-13 July 1990
San Diego, CA, United States
Fabrication of Multilayer X-Ray/EUV Coatings
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 2 (1 February 1991); doi: 10.1117/12.23172
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 14 (1 February 1991); doi: 10.1117/12.23173
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 25 (1 February 1991); doi: 10.1117/12.23174
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 32 (1 February 1991); doi: 10.1117/12.23175
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 39 (1 February 1991); doi: 10.1117/12.23176
Design, Characterization, and Test of Multilayer X-Ray/EUV Coatings
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 73 (1 February 1991); doi: 10.1117/12.23177
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 64 (1 February 1991); doi: 10.1117/12.23179
Multilayer X-Ray/EUV Monochromators and Imaging Microscopes
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 95 (1 February 1991); doi: 10.1117/12.23182
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 104 (1 February 1991); doi: 10.1117/12.23183
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 110 (1 February 1991); doi: 10.1117/12.23184
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 122 (1 February 1991); doi: 10.1117/12.23185
X-Ray/EUV Telescopes
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 134 (1 February 1991); doi: 10.1117/12.23186
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 145 (1 February 1991); doi: 10.1117/12.23187
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 155 (1 February 1991); doi: 10.1117/12.23188
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 162 (1 February 1991); doi: 10.1117/12.23189
Test and Calibration Performance of X-Ray/EUV Instruments
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 166 (1 February 1991); doi: 10.1117/12.23190
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 175 (1 February 1991); doi: 10.1117/12.23191
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 189 (1 February 1991); doi: 10.1117/12.23192
XUV/Soft X-Ray Projection Lithography I
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 204 (1 February 1991); doi: 10.1117/12.23193
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 214 (1 February 1991); doi: 10.1117/12.23194
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 229 (1 February 1991); doi: 10.1117/12.23195
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 241 (1 February 1991); doi: 10.1117/12.23196
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 245 (1 February 1991); doi: 10.1117/12.23197
XUV/Soft X-Ray Projection Lithography II
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 258 (1 February 1991); doi: 10.1117/12.23198
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 274 (1 February 1991); doi: 10.1117/12.23200
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 283 (1 February 1991); doi: 10.1117/12.23201
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 292 (1 February 1991); doi: 10.1117/12.23202
X-Ray/EUV Space Observatories and Missions
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 310 (1 February 1991); doi: 10.1117/12.23203
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 319 (1 February 1991); doi: 10.1117/12.23204
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 334 (1 February 1991); doi: 10.1117/12.23206
X-Ray/EUV Telescopes for Solar Research
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 359 (1 February 1991); doi: 10.1117/12.23207
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 376 (1 February 1991); doi: 10.1117/12.23208
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 389 (1 February 1991); doi: 10.1117/12.23209
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 404 (1 February 1991); doi: 10.1117/12.23210
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 415 (1 February 1991); doi: 10.1117/12.23211
X-Ray/EUV Polarimetry
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 438 (1 February 1991); doi: 10.1117/12.23213
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 457 (1 February 1991); doi: 10.1117/12.23215
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 469 (1 February 1991); doi: 10.1117/12.23216
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 477 (1 February 1991); doi: 10.1117/12.23217
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 485 (1 February 1991); doi: 10.1117/12.23218
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 500 (1 February 1991); doi: 10.1117/12.23219
X-Ray/EUV Filters and Gratings
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 544 (1 February 1991); doi: 10.1117/12.23221
X-Ray/EUV Spectrographs
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 520 (1 February 1991); doi: 10.1117/12.23222
X-Ray/EUV Telescopes for Solar Research
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 350 (1 February 1991); doi: 10.1117/12.23223
X-Ray/EUV Polarimetry
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 512 (1 February 1991); doi: 10.1117/12.23225
X-Ray/EUV Spectrographs
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 530 (1 February 1991); doi: 10.1117/12.23226
X-Ray/EUV Filters and Gratings
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 558 (1 February 1991); doi: 10.1117/12.23229
X-Ray/EUV Telescopes for Solar Research
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 428 (1 February 1991); doi: 10.1117/12.23230
Fabrication of Multilayer X-Ray/EUV Coatings
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 56 (1 February 1991); doi: 10.1117/12.23231
Multilayer X-Ray/EUV Monochromators and Imaging Microscopes
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 84 (1 February 1991); doi: 10.1117/12.23232
X-Ray/EUV Filters and Gratings
Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, pg 566 (1 February 1991); doi: 10.1117/12.23233
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