1 February 1991 EUV performance of a multilayer-coated high-density toroidal grating
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Abstract
Performance of a multilayer coated diffraction grating has been evaluated in the EUV. The application of a multilayer coating to a blazed toroidal grating of high ruling density has produced a significant enhancement in grating efficiency in the 30 run spectral region in first order and has maintained the excellent quasi stigmatic spectral resolution of the grating.
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Ritva A. M. Keski-Kuha, Ritva A. M. Keski-Kuha, Roger J. Thomas, Roger J. Thomas, Werner M. Neupert, Werner M. Neupert, Charles E. Condor, Charles E. Condor, Jeffrey S. Gum, Jeffrey S. Gum, } "EUV performance of a multilayer-coated high-density toroidal grating", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); doi: 10.1117/12.23233; https://doi.org/10.1117/12.23233
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